Method and device for imaging a radiation-sensitive substrate

US9052608B2 · kind B2 · utility

Assignee

• Heidelberg Instruments Mikrotechnik GMBH · DE

Inventors

• Roelof Wijnaendts Van Resandt · Bad Schönborn, DE
• Roland Kaplan · Heidelberg, DE

Key dates

• Filing date: Oct 23, 2009
• Grant date: Jun 9, 2015
• Expiry date: Jun 3, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70466
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method and apparatus for imaging a radiation-sensitive substrate, wherein a programmable template is projected onto the radiation-sensitive substrate using coherent radiation having a wavelength at which the substrate is radiation sensitive. An overall image of the programmable template having an image grid is displaced simultaneously by an acoustic-optical or electro-optical deflection unit such that multiple projections impinge on the substrate at different positions such that a fine partial grid is created in the image grid on the substrate.