Pressure resistently encapsulated, pressure difference sensor

US9054222B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Anh Tuan Tham · Berlin, DE
• Frank Passler · Berlin, DE
• Rafael Teipen · Berlin, DE

Key dates

• Filing date: Feb 10, 2012
• Grant date: Jun 9, 2015
• Expiry date: Apr 27, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.