Method for manufacturing absorber layer of thin film solar cell using MOCVD
US9054268B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2013 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | Aug 20, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for manufacturing an absorber layer of thin film solar cells is revealed. Firstly vapors of different metal-organic sources are generated in a plurality of containers used for mounting different metal-organic sources. Then the vapors of the metal-organic sources are mixed with a carrier gas and are filled into a reaction together with a reaction gas chamber through pipelines. Next the metals and the compounds are deposited on a substrate in the reaction chamber to form an absorber layer of a thin film solar cell. A flow rate of each metalorganic vapors filled into the reaction chamber is controlled by a mass flow controller respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.