Separating device for process chambers of vacuum coating installations and vacuum coating installation
US9057131B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2006 |
| Grant date | Jun 16, 2015 |
| Priority date | — |
| Expiry date | Nov 26, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/54
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A separating device for process chambers arranged one after the other in a vacuum coating installation for coating two-dimensional substrates comprises a separating element which can be fitted between two process chambers transversely in relation to the transporting direction of the substrates. The element comprises a passage for the substrate that is arranged in the region of the transporting plane of the substrate and formed by at least one through-opening provided in the separating element, and includes at least one closure, optionally closing or opening the passage. An intermediate chamber formed by intermediate chamber outer walls is also provided and the separating element is arranged inside the intermediate chamber and the intermediate chamber is subdivided into two intermediate chamber segments. In this configuration, the separating device forms a chamber of its own, arranged between two neighboring process chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.