Airflow-organization testing method for a clean room and system using the same method
US9057709B2 · kind B2 · utility
2Cited by
6References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 21, 2012 |
| Grant date | Jun 16, 2015 |
| Priority date | — |
| Expiry date | Dec 24, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/0077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.