Patent · US Active

Rotatable sputter target comprising an end-block with a liquid coolant supply system

US9058961B2 · kind B2 · utility

0Cited by

4References

7Claims

0Family size

Assignee

VON ARDENNE GMBH · DE

Inventors

Thorsten Sander · Dresden, DE
Cornell Weidelt · Dresden, DE
Hans-Juergen Heinrich · Ennepetal, DE

Key dates

Filing date	May 6, 2009
Grant date	Jun 16, 2015
Priority date	—
Expiry date	Jan 4, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/342
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A tube target with an end block for supplying coolant to the tube target is provided. The end block comprises a rotatably mounted carrier shaft for holding and rotating the tube target; a connecting sleeve arranged in the carrier shaft; a sealing element for the tube target on its end facing the end block; a coolant inlet port in the interior of the tube target; and a coolant outlet port. The coolant outlet port is formed by at least one aperture in the sealing element. The aperture is located in the vicinity of the wall of the tube target, and eccentrically to the rotational axis of the tube target.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.