Laser annealing device
US9061368B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 5, 2012 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Apr 12, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/56
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention relates to an improved laser annealing device, which includes a laser beam, a housing, a laser beam output window formed in a top of the housing, a substrate located at a bottom of the housing for carrying a material to be annealed, and a movable mask arranged between the laser beam output window and the substrate. The mask is set in inclination with respect to a horizontal direction. The mask forms a slit extending through upper and lower surfaces thereof. The laser beam travels vertically down through the laser beam output window and then passes through the slit to irradiate the substrate. The improved laser annealing device of the present invention includes a mask set in inclination with respect to the horizontal direction to prevent scraps from affecting the laser head, reduce replacement of the laser head, and lower down the cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.