Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
US9061895B2 · kind B2 · utility
4Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2010 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | May 24, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for producing a micromechanical structure including a substrate and a stack of at least two layers arranged on the substrate is provided. A mobile part is formed in the stack and a fixed part relative to the substrate is formed in the stack, and an opposite surface is formed between the fixed part and the mobile part, to present a stop device to limit displacement of the mobile part in a direction substantially perpendicular to the stack. The process uses at least one sacrificial layer between the substrate and the stack made of material suitable to be etched selectively relative to the materials of the stack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.