Processes and systems for purifying silane
US9061916B2 · kind B2 · utility
0Cited by
17References
14Claims
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Assignee
Inventors
Key dates
| Filing date | Dec 10, 2012 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Aug 9, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/10
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Processes and systems for purifying silane-containing streams and, in particular, for purifying silane-containing streams that also contain ethylene are disclosed. The processes and systems may be arranged such that one or more ethylene reactors are downstream of light-end distillation operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.