Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules

US9062368B2 · kind B2 · utility

Assignee

• THE REGENTS OF THE UNIVERSITY OF MICHIGAN · US

Inventors

• Stephen R. Forrest · Ann Arbor, US
• Garen V. Vartanian · Ann Arbor, US
• Cedric Rolin · Lasne, BE

Key dates

• Filing date: Oct 16, 2012
• Grant date: Jun 23, 2015
• Expiry date: Apr 6, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/8416
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.