Patent · US Active

Device for supplying the liquid material inside a filling container and method of controlling the liquid level inside the filling container for said liquid material supply device

US9062996B2 · kind B2 · utility

1Cited by

1References

5Claims

0Family size

Assignee

L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

Toshiyuki Nakagawa · Tokyo, JP
Takamitsu Shigemoto · Urayasu, JP
Yoshio Uetake · Tsukubamirai, JP
Masahiro Kimoto · Tokyo, JP
Tetsuro Shigeno · Itami, JP
Masaaki Muro · Itami, JP
Naoyuki Nakamoto · Himeji, JP

Key dates

Filing date	Jan 27, 2010
Grant date	Jun 23, 2015
Priority date	—
Expiry date	Oct 23, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG01F23/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.