Birefringence correction for imaging ellipsometric bioassay system and method
US9063072B1 · kind B1 · utility
1Cited by
14References
10Claims
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Key dates
| Filing date | Jun 12, 2012 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Jul 15, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/212
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, apparatus and method for analysis of a specimen using ellipsometric analysis. Polarization distortions caused by the propagation of polarized light within a substrate upon which a specimen is located are reduced by directing light at selected polarizations at the substrate alone and the specimen on the substrate. Image data is collected for each of the selected polarizations and processed to remove errors due to birefringence. Fourier transform processing is used to obtain polarization phase data for correcting polarization caused by any birefringence in the substrate, and optionally amplitude data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.