Hall sensor element and method for measuring a magnetic field

US9063187B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Wolfgang Hellwig · Hahnheim, DE
• Friedemann Eberhardt · Reutlingen, DE
• Valentin von Tils · Nehren, DE
• Stefan Ruebenacke · Reutlingen, DE

Key dates

• Filing date: Apr 30, 2010
• Grant date: Jun 23, 2015
• Expiry date: Aug 20, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N52/101
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention provides a Hall sensor element having a substrate, which has a main surface, having an electrically conductive active region, which extends from the main surface into the substrate, and having a first electrically conductive, buried layer in the substrate, which contacts the active region at a first lower contact surface. From another standpoint, the invention provides a method for measuring a magnetic field with the aid of such a Hall sensor element, in which an electrical measuring current is conducted through the active region between a first upper contact electrode at the main surface and the first lower contact surface. A Hall voltage is picked up in the active region along a path running inclined with respect to a connecting line between the first lower contact surface and the first upper contact electrode. Alternatively, a measuring current is conducted through the active region over such a path, and a Hall voltage is picked up between the first upper contact electrode and the first lower contact surface.