Methods and processes for modifying polymer material surface interactions

US9063408B2 · kind B2 · utility

Assignee

• OBDUCAT AB · SE

Inventors

• Jakob Nilsson · Säter, SE
• Matthias Keil · Malmö, SE
• Johan Ring · Malmö, SE
• Babak Heidari · Furulund, SE

Key dates

• Filing date: Dec 10, 2009
• Grant date: Jun 23, 2015
• Expiry date: Jan 19, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/038
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention to provide curable materials, comprising photo-reactive compounds, in particular, photoinitiators and polymerizable mono- or multifunctional monomers such as acrylates or epoxides. The material may also contain fluoro-surfactants completely or partly terminated by functional groups with the ability to bind covalently to said chemical composition under curing. The curable compositions are either purely acrylate based or a hybrid of different types of monomers such as acrylates, epoxides or vinyl ethers. The polymerizable monomers may cure with the use of different types of photoinitiator, such as free radical photoinitiators or cationic photoinitiators, ultimately forming a hybrid resist comprising interpenetrating networks of different types of monomers e.g. acrylates and epoxides. The acrylate/epoxide hybrid system has showed improved replication properties in terms of high nano-imprint lithography process fidelity, due to increased conversion of acrylates and low shrinkage.