Non-evaporable getter alloys reactivable after exposure to reactive gases
US9064668B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2013 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Nov 29, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/948
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Getter materials are described. The getter materials have non-evaporable getter alloys in their powder form having high gas sorption efficiency, particularly for hydrogen, carbon oxide and nitrogen, which after having lost their functionality in consequence of the exposure to reactive gases at a first temperature, can then be reactivated through a thermal treatment at a temperature between 400° C. and 600° C. The alloy powders have as compositional elements titanium and silicon and at least one additional metallic element selected among vanadium, iron and aluminum and have an atomic percentage composition of the elements which can vary within the following ranges: 1. Titanium from 60 to 85 atomic percentage; 2. Silicon from 1 to 20 atomic percentage; and 3. The sum of vanadium, iron and aluminum from 10 to 30 atomic percentage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.