Apparatus and method for forming a transparent conductive oxide layer over a substrate using a laser
US9065009B2 · kind B2 · utility
0Cited by
7References
11Claims
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Key dates
| Filing date | Apr 9, 2013 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Jul 17, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for converting an amorphous transparent conductive oxide to a crystalline form with the assistance of irradiation of a laser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.