Patent · US Active

Electrochemical etching

US9068274B1 · kind B1 · utility

0Cited by
21References
15Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 13, 2010
Grant dateJun 30, 2015
Priority date
Expiry dateApr 27, 2031

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC25F3/14
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Methods to etch a workpiece are described. In one embodiment, a workpiece is disposed within an etchant solution having a composition comprising a dilute acid and a non-ionic surfactant. An electric field is generated within the etchant solution to cause an anisotropic etch pattern to form on a surface of the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.