Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements

US9068834B2 · kind B2 · utility

Assignee

• Continental Teves AG & Co. OHG · DE

Inventors

• Stefan Günthner · Frankfurt am Main, DE
• Ramnath Sivaraman · Frankfurt, DE
• Bernhard Schmid · Friedberg, DE
• Jasmin Lohmann · Brombachtal, DE

Key dates

• Filing date: Sep 9, 2010
• Grant date: Jun 30, 2015
• Expiry date: Nov 30, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5719
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rotation rate sensor, including a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the x-y plane.