Nanogap sensor and method of manufacturing the same
US9068914B2 · kind B2 · utility
3Cited by
8References
22Claims
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Key dates
| Filing date | Sep 6, 2012 |
| Grant date | Jun 30, 2015 |
| Priority date | — |
| Expiry date | Mar 13, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0038
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A nanogap sensor includes a first layer in which a micropore is formed; a graphene sheet disposed on the first layer and including a nanoelectrode region in which a nanogap is formed, the nanogap aligned with the micropore; a first electrode formed on the grapheme sheet; and a second electrode formed on the graphene sheet, wherein the first electrode and the second electrode are connected to respective ends of the nanoelectrode region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.