Patent · US Active

Self test of MEMS gyroscope with ASICs integrated capacitors

US9069006B2 · kind B2 · utility

14Cited by

67References

20Claims

0Family size

Assignee

FAIRCHILD SEMICONDUCTOR CORPORATION · US

Inventors

Ion Opris · San Jose, US
Justin Seng · San Jose, US

Key dates

Filing date	Feb 12, 2013
Grant date	Jun 30, 2015
Priority date	—
Expiry date	Mar 9, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01P21/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus includes a MEMS gyroscope sensor including a first sensing capacitor and a second sensing capacitor and an IC. The IC includes a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC, and a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.