Multiple frequency atomic force microscopy
US9069007B2 · kind B2 · utility
2Cited by
34References
17Claims
0Family size
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Key dates
| Filing date | May 28, 2013 |
| Grant date | Jun 30, 2015 |
| Priority date | — |
| Expiry date | May 28, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.