Patent · US Active

Method for forming an electrode

US9071222B2 · kind B2 · utility

0Cited by

5References

17Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Andreas Link · Munich, DE
Gudrun Henn · Ebenhausen, DE
Rainer Braun · Magstadt, DE

Key dates

Filing date	Oct 14, 2011
Grant date	Jun 30, 2015
Priority date	—
Expiry date	Mar 12, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49002
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A microacoustic component includes an active layer and an electrode. The electrode includes a first metal layer facing the active layer, a second metal layer facing away from the active layer, and a third layer arranged between the first metal layer and the second metal layer. The third layer serves as a diffusion barrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.