Polisher, pressure plate of the polisher and method of polishing
US9073171B2 · kind B2 · utility
0Cited by
16References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2009 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Jan 5, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/002
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polisher, a pressure plate (20) of the polisher, and a method of polishing are disclosed. The pressure plate (20) includes a main body, an air bag (50) mounted to one surface of the main body to adjust a pressure applied from the main body to a polishing object, and a pad (16b) having a ring shape, mounted along a circumference of the one surface of the main body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.