Displacement detecting device
US9074861B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 14, 2012 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Jun 3, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A displacement detecting device includes a light source, a beam splitting section, a diffraction grating, a reflecting section, a beam combining section, a light receiving section, and a relative position information output section. The diffraction grating is adapted to diffract a first beam reflected by a surface-to-be-measured of a member-to-be-measured, and cause the diffracted first beam to be incident again on the surface-to-be-measured. The reflecting section is adapted to reflect a second beam split by the beam splitting section to the beam splitting section. The light receiving section is adapted to receive interfering light of the first beam and the second beam. The relative position information output section is adapted to output displacement information of the surface-to-be-measured in the height direction based on intensity of the received interfering light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.