Corrective fiber-optic microprobe for white light interferometric measurements
US9074862B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 3, 2012 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Jun 3, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/005
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optically corrective microprobe for white light interferometry is disclosed. In white light interferometry which uses different spectral ranges, the dispersion-induced dependency of optical path differences on the wavelength between measurement light bundle and reference light bundle is compensated by an efficient, easily miniaturized arrangement. A reference beamsplitter with partially reflecting filters in at least two different spectral ranges for generating at least two transmitted measurement light bundles and associated reflected reference light bundles of nonoverlapping spectral ranges is arranged between the light output surface of the light-conducting fiber and the focusing optics. An axial distance between two partially reflecting filters is adjusted in such a way that a spectrally induced optical path difference to which the respective measurement light bundles are subjected when passing through dispersive elements in the light path to the object surface and back is present to the same magnitude between the respective reference light bundles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.