Double-axle, shock-resistant rotation rate sensor with linear and rotary seismic elements

US9074890B2 · kind B2 · utility

Assignee

• Continental Teves AG & Co. OHG · DE

Inventors

• Stefan Günthner · Frankfurt am Main, DE
• Bernhard Schmid · Friedberg, DE

Key dates

• Filing date: Sep 9, 2010
• Grant date: Jul 7, 2015
• Expiry date: Apr 2, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5719
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rotation rate sensor has at least one first and one second seismic mass coupled to at least one first drive device and are suspended such that the first and second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the first and second seismic masses are designed and suspended such that they oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis is detected, and the first and second seismic masses and/or additional seismic masses are designed and suspended such that they oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis is detected.