CMOS-compatible silicon nano-wire sensors with biochemical and cellular interfaces
US9076665B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2007 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Dec 25, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/83
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The systems and methods described herein include a sensor for suitable for sensing chemical and biological substances. The sensor comprises a semiconductor layer formed in or on a substrate and a channel having nano-scale dimensions formed in the semiconductor layer, where the structure creates an electrically conducting pathway between a first contact and a second contact on the semiconductor layer. In certain preferred embodiments, the nano-scale channel has a trapezoidal cross-section with an effective width and exposed lateral faces, where the effective width is selected to have same order of magnitude as a Debye length (LD) of the semiconductor material of which the semiconductor layer is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.