Microphone with aligned apertures
US9078068B2 · kind B2 · utility
5Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2008 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Mar 14, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49005
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS microphone has a backplate with a given backplate aperture, and a diaphragm having a diaphragm aperture. The given backplate aperture is substantially aligned with the diaphragm aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.