Device for interferential distance measurement

US9080857B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Walter Huber · Traunstein, DE
• Birgit Lange · Lübeck, DE
• Michael Hermann · Tacherting, DE

Key dates

• Filing date: Mar 21, 2011
• Grant date: Jul 14, 2015
• Expiry date: Apr 14, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B2290/70
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device for interferential distance measurement that includes a light source that emits a light beam along a propagation direction and a scanning plate including a splitter that splits the light beam into a measurement beam and a reference beam. The device further including a reflector disposed spaced-apart in a direction of the propagation direction and a detector element. The measurement beam and the reference beam are propagated from the splitter along different optical paths toward the reflector, where a back reflection of the measurement beam and the reference beam occurs at the reflector toward the scanning plate. In addition, at a combining location the measurement beam and the reference beam attain interfering superposition, and wherein the measurement beam and the reference beam interfering at the combining location are detected by the detector element so that the detector element generates a distance signal regarding a distance between the scanning plate and the reflector.