Electronic component for high temperatures

US9080967B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Richard Fix · Gerlingen, DE
• Markus Widenmeyer · Schenefeld, DE

Key dates

• Filing date: Feb 1, 2011
• Grant date: Jul 14, 2015
• Expiry date: Nov 17, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/414
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A chemically sensitive field effect transistor includes a substrate, a conductor track structure situated on the substrate, and a functional layer which is contacted via the conductor track structure. To be able to form a thin, oxidation-stable and temperature-stable conductor track structure, the conductor track structure is made of a metal mixture which includes platinum and one or more metals selected from the group made up of rhodium, iridium, ruthenium, palladium, osmium, gold, scandium, yttrium, lanthanum, the lanthanides, titanium, zirconium, hafnium, niobium, tantalum, chromium, tungsten, rhenium, iron, cobalt, nickel, copper, boron, aluminum, gallium, indium, silicon, and germanium.