Yaw-rate sensor

US9081027B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Reinhard Neul · Stuttgart, DE
• Johannes Classen · Reutlingen, DE
• Torsten Ohms · Lambach, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Axel Franke · Ditzingen, DE
• Oliver Kohn · Reutlingen, DE
• Daniel Christoph Meisel · Pittsburgh, US
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Kersten Kehr · Zwota, DE

Key dates

• Filing date: Oct 2, 2008
• Grant date: Jul 14, 2015
• Expiry date: Feb 27, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P3/44
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.