Scanning probe microscope with improved feature location capabilities
US9081028B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 19, 2013 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Mar 19, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.