Patent · US Active

Replacement apparatus for an optical element

US9081296B2 · kind B2 · utility

0Cited by

119References

29Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jens Kugler · Heubach, DE
Franz Sorg · Aalen, DE
Andreas Wurmbrand · Aalen, DE
Thomas Schletterer · Oberkochen, DE
Thomas Ittner · Aalen, DE

Key dates

Filing date	Sep 29, 2014
Grant date	Jul 14, 2015
Priority date	—
Expiry date	Sep 29, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.