Electronic device, method for manufacturing the same and touch panel including the same
US9081460B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2012 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Apr 27, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2203/04103
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Provided are an electronic device, a method of manufacturing the same, and a touch panel including the device. The electronic device includes a nanostructure having a plurality of metal oxide nanorods vertically aligned at predetermined intervals in intersection regions between bottom electrodes and top electrodes that perpendicularly cross each other. The nanorods are formed to the same diameter and the same height so that the electronic device can exhibit uniform performance. Also, a method of manufacturing an electronic device includes selectively vertically growing the same number of metal oxide nanostructures with a uniform size only on the bottom electrodes using a nano-template with a plurality of vertical holes. Furthermore, a touch panel includes a nanostructure having a plurality of piezoelectric nanorods disposed in a plurality of touch cells arranged in a matrix.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.