Zone compensated multilayer laue lens and apparatus and method of fabricating the same
US9082522B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2010 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Jul 31, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/10
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90° as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.