Process device for processing in particular stacked processed goods
US9082796B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Jun 19, 2009 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Jun 19, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing device for processing stacked processed goods for the production of conducting, semiconducting, or insulating thin layers includes, in at least one embodiment, an evacuatable process chamber configured to receive a process gas. A tempering device keeps at least a partial region of a wall of the evacuatable process chamber at a predetermined first temperature during at least part of the processing. The first temperature is between a second temperature that is room temperature and a third temperature, generated in the evacuatable process chamber, that is above room temperature. A heated gas flow cycle flows through a gas guiding device in the evacuatable process chamber. The stacked processed goods are insertable through a lockable loading opening into the gas guiding device, and a gas inlet device feeds the process gas into the gas flow cycle. A process system may further include a cooling device and/or a channeling device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.