Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9083302B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2011 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | May 14, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/175
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
In a representative embodiment, a bulk acoustic wave (BAW) resonator comprises: a cavity provided in a first layer and having a perimeter bordering an active region of the BAW resonator, a distributed Bragg reflector (DBR) bordering the cavity, wherein the first layer is one of the layers of the DBR; a first electrode disposed over the substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer; a second piezoelectric layer disposed over the second electrode; a third electrode disposed over the second piezoelectric layer; and a bridge disposed between the first electrode and the third electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.