Method of manufacturing a probe comprising a cantilever with a conduit
US9086431B2 · kind B2 · utility
0Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 13, 2012 |
| Grant date | Jul 21, 2015 |
| Priority date | — |
| Expiry date | May 28, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.