Variable capacitance device
US9087929B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2014 |
| Grant date | Jul 21, 2015 |
| Priority date | — |
| Expiry date | Apr 10, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.