Acoustic wave device
US9087979B2 · kind B2 · utility
5Cited by
3References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2013 |
| Grant date | Jul 21, 2015 |
| Priority date | — |
| Expiry date | Oct 24, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/853
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes: a piezoelectric film made of an aluminum nitride film containing a divalent element and a tetravalent element, or a divalent element and a pentavalent element; and an electrode that excites an acoustic wave propagating through the piezoelectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.