Impedance matching device, linear motion module, and radio frequency power supply device
US9088266B2 · kind B2 · utility
1Cited by
2References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 10, 2013 |
| Grant date | Jul 21, 2015 |
| Priority date | — |
| Expiry date | Dec 10, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/26
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.