Laser pulse generation method and apparatus
US9089927B2 · kind B2 · utility
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3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2011 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Nov 9, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0085
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and apparatus of generating a laser pulse of a desired energy and micro-machining a substrate using the laser pulse. A beam of light is provided from a laser source. The beam is directed via a modulator to produce an output laser pulse with a portion of the laser pulse being used to determine the energy of the laser pulse. The modulator is controlled so as to switch off the output laser pulse when the determined energy of the output laser pulse reaches a threshold value. The output laser pulse is steered to a substrate for micro-machining.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.