Temporary optical wave diffusion-promoting film adhered to lidded MEMS wafer for testing using interferometer
US9090461B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Apr 30, 2013 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Apr 30, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C99/004
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A temporary optical wave diffusion-promoting film is adhered to a lidded microelectromechanical systems (MEMS) wafer. Testing is performed on the lidded MEMS wafer using an interferometer directed towards the temporary optical wave diffusion-promoting film applied to the lidded MEMS wafer. The temporary optical wave diffusion-promoting film is peeled from the lidded MEMS wafer to remove the temporary optical wave diffusion-promoting film from the lidded MEMS wafer after performing the testing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.