Nanoimprint-mold release agent, surface treatment method, and nanoimprint mold
US9090502B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | Apr 11, 2012 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | May 6, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/31
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A nanoimprint-mold release agent including an alkoxysilane compound represented by general formula (1) is providedwherein Rf and Rf′ are each independently a fluoroalkyl group of 1 to 10 carbon atoms; R1 is a hydrogen atom or an aliphatic monovalent hydrocarbon group of 1 to 6 carbon atoms; R2 and R3 are each independently methyl group or ethyl group; X and Y are each independently an ether linkage or an ester linkage; a and b are each 0 or 1; m, n, and p are each an integer of 0 to 6; q is an integer of 1 to 6 and r is an integer of 0 to 2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.