Structuring three-dimensional components with non-diffusing noble or special metals and their alloys, with use being made of sputter technology

US9090975B2 · kind B2 · utility

Assignee

• HERAEUS PRECIOUS METALS GMBH & CO. KG · DE

Inventors

• Heiko Specht · Hanau, DE
• Andreas Reisinger · Malterdingen, DE
• Ulrich Hausch · Frankfurt, DE
• Frank Krueger · Nidderau, DE
• Jens Troetzschel · Bruchköbel, DE

Key dates

• Filing date: Jun 20, 2011
• Grant date: Jul 28, 2015
• Expiry date: Apr 25, 2034

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0181
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

One aspect is a method for the production of a three-dimensional structure of successive layers producing a multitude of successive layers wherein, with the exception of a first layer, each of the successive layers is arranged on a preceding layer. Each of the successive layers includes at least two materials wherein one material is a sacrificial material and one material is a structure material. Each of the successive layers defines a successive cross-section through the three-dimensional structure. Producing each of the layers includes depositing the sacrificial material by means of an electrochemical process and depositing the structure material by means of physical gas phase deposition. After a multitude of successive layers has been produced, the three-dimensional structure is uncovered by removing at least a part of the sacrificial material. The sacrificial material is at least one of a group consisting of nickel, silver, palladium, and gold.