Patent · US Active

Grating-based scanner with phase and pitch adjustment

US9091529B2 · kind B2 · utility

3Cited by
19References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 9, 2012
Grant dateJul 28, 2015
Priority date
Expiry dateJan 1, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/2536
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for determining three-dimensional coordinates of an object point on a surface of an object, the method including steps of: sending a beam of light to a diffraction grating; sending a first diffracted beam and a second diffracted beam to an objective lens to form at least two spots of light, which are passed through transparent regions of a plate to produce a first fringe pattern on the surface of the object; imaging the object point illuminated by the first fringe pattern onto a photosensitive array to obtain a first electrical data value; moving the plate to a second position; sending spots through plate to produce a second fringe pattern on the surface of the object; imaging the point onto the array point to obtain a second electrical data value; and calculating the three-dimensional coordinates of the first object point.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.