Sensor element, force detecting device, and robot
US9091607B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2012 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Feb 23, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L5/226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor element is formed by, when an α axis, a β axis orthogonal to the α axis, and a γ axis orthogonal to the α axis and the β axis are set, laminating piezoelectric substrates and electrodes in the γ axis direction. The sensor element includes connecting sections arranged such that a part of external sections of the electrodes aligns with a part of external sections of the piezoelectric substrates. The connecting sections are arranged not to align with one another in a direction of the γ axis. Conductors that electrically connect the connecting sections and external connecting sections are formed along outer peripheral sections of the piezoelectric substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.