Patent · US Active

Double seal ring

US9093308B2 · kind B2 · utility

9Cited by

5References

20Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Ming-Hui Yang · Chandler, US
Hsin Wei Chiu · Hsinchu, TW

Key dates

Filing date	Aug 8, 2013
Grant date	Jul 28, 2015
Priority date	—
Expiry date	Sep 6, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A double seal ring for an integrated circuit, the double seal ring includes a first seal ring surrounding the integrated circuit and a second seal ring spaced from the first seal ring. The double seal ring further includes two connectors connecting the first seal ring and the second seal ring, wherein the first seal ring, the second seal ring, and the two connectors form a closed loop. A method of forming a double seal ring for an integrated circuit includes forming a first seal ring surrounding the integrated circuit and forming a second seal ring spaced from the first seal ring. The method further includes forming two connectors connecting the first seal ring and the second seal ring, wherein the first seal ring, the second seal ring, and the two connectors form a closed loop.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.