Method of in-line diffusion for solar cells
US9093598B2 · kind B2 · utility
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Key dates
| Filing date | Apr 12, 2013 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Apr 12, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method is provided for the simultaneous diffusion of dopants of different types on respective sides of a solar cell wafer in a single stage process. The dopants are applied to respective sides of the wafer in wet chemical form preferably by pad printing. The doping materials can be applied to the entire wafer surface or effective area thereof, or can be applied in a pattern to suit the intended solar cell configuration. In a typical embodiment, the dopants are boron and phosphorus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.