Micro-electro-mechanical-system (MEMS) driver
US9094027B2 · kind B2 · utility
17Cited by
68References
23Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 11, 2013 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | May 13, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02283
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
In an example, a driver for a micro-electro-mechanical-system (MEMS) device can include a first input configured to receive a first command signal including an oscillatory command signal, a second input configured to receive a second command signal including a bias command signal, and an amplifier configured to receive a high voltage supply, to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.